Demonstration of tunable optical delay lines based on apodized grating waveguides.

High-speed and tunable integrated optical delay lines are demonstrated based on silicon grating waveguides apodized by the super-Gaussian function. The submicron channel waveguides with inward-apodized gratings are fabricated by deep-ultraviolet optical lithography. Characterization of the compact delay lines shows that they offer true-time delays as long as 132 ps, tuning range of ~86 ps, and a minimum bit rate of ~13 Gb/s. For lower bit rates, delays as high as 220 ps and tuning range of 174 ps are feasible.